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|Title:||Multi-functional MEMSINEMS for Nanometrology Applications|
|Keywords:||micro- and nano-electromechanical systems;excitation and readout methods;nanometrology|
|Citation:||IEEE, pp. 1119 - 1124|
|Abstract:||As micro- and nano-electromechanical systems (M/NEMS) enter more widely into sensing applications and precision nanometrology it is timely to consider the advantages to be gained from a excitation and readout system which may be tailored for a wide range of applications. In this paper we describe a system that we are developing which allows a combination of excitation and readout methods which impact on many potential applications.|
|Appears in Collections:||Dept of Design Research Papers|
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