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Title: Multi-functional MEMSINEMS for Nanometrology Applications
Authors: Hao, L
Gallop, J
Stewart, M
Lees, K
Chen, J
Keywords: micro- and nano-electromechanical systems;excitation and readout methods;nanometrology
Issue Date: 2013
Publisher: IEEE
Citation: IEEE, pp. 1119 - 1124
Abstract: As micro- and nano-electromechanical systems (M/NEMS) enter more widely into sensing applications and precision nanometrology it is timely to consider the advantages to be gained from a excitation and readout system which may be tailored for a wide range of applications. In this paper we describe a system that we are developing which allows a combination of excitation and readout methods which impact on many potential applications.
Appears in Collections:Dept of Design Research Papers

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