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Title: Analysis and design of an all metal in line series ohmic RF MEMS switch for microwave applications
Authors: Spasos, M
Charalampidis, N
Tsiakmakis, K
Nilavalan, R
Keywords: All metal in line series ohmic RF MEMS switch;Hammerhead;Distributed Actuation Force
Issue Date: 2010
Publisher: IEEE
Citation: M. Spasos, N. Charalampidis, K. Tsiakmakis and R. Nilavalan, Analysis and design of an all metal in line series ohmic RF MEMS switch for microwave applications, In proceedings of the Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP 2010), Seville, Spain, 5-7 May 2010
Abstract: Abstract: - This paper presents the analysis, design and simulation of an all metal in line series ohmic RF MEMS switch. The proposed switch is indented to be used in the frequency range between DC and 10GHz. The switching characteristics of the proposed switch fulfill all the requirements as concerns loss, isolation, linearity, power handling and small size/power consumption. The specific design of the cantilever (hammerhead) and the distributed actuation force ensure the reliability and the controllability of the switch and the relatively simple design (all metal) the robustness and high fabrication yield.
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Appears in Collections:Electronic and Computer Engineering
Dept of Electronic and Computer Engineering Research Papers

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