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Title: An investigation of nanoindentation tests on the single crystal copper thin film via an AFM and MD simulation
Authors: Huo, D
Liang, Y
Cheng, K
Keywords: Mechanical properties;Thin film;Nanoindentation;Molecular dynamics;Atomic force microscope
Issue Date: 2007
Publisher: IMechE
Citation: D. Huo, Y. Liang and K. Cheng, An investigation of nanoindentation tests on the single crystal copper thin film via an AFM and MD simulation, Proceedings of the IMechE, Part C: Journal of Mechanical Engineering Science, Vol. 221, 2007, pp. 259-266.
Series/Report no.: 3;
Abstract: Nanoindentation tests performed in an atomic force microscope have been utilized to directly measure the mechanical properties of single crystal metal thin films fabricated by the vacuum vapor deposition technique. Nanoindentation tests were conducted at various indentation depths to study the effect of indentation depths on the mechanical properties of thin films. The results were interpreted by using the Oliver-Pharr method with which direct observation and measurement of the contact area are not required. The elastic modulus of the single crystal copper film at various indentation depths was determined as 67.0±6.9GPa on average which is in reasonable agreement with the results reported by others. The indentation hardness constantly increases with decreasing indentation depth, indicating a strong size effect. In addition to the experimental work, a three-dimensional nanoindentation model of molecular dynamics (MD) simulations with embedded atom method (EAM) potential is proposed to elucidate the mechanics and mechanisms of nanoindentation of thin films from the atomistic point of view. MD simulations results also show that due to the size effect the plastic deformation via amorphous transformation is more favorable than via the generation and propagation of dislocations in nanoindentation of single crystal copper thin films.
ISSN: 0954-4062
Appears in Collections:Advanced Manufacturing and Enterprise Engineering (AMEE)
Dept of Mechanical Aerospace and Civil Engineering Research Papers

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