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Title: Toward the use of NanoSQUIDs to measure the displacement of an NEMS resonator
Authors: Patel, T
Li, B
Li, T
Wang, R
Gallop, JC
Cox, DC
Chen, J
Romans, EJ
Hao, L
Keywords: NanoSQUIDs;SQUIDs;Nanoelectromechanical systems;NEMS;Flux coupling;Nanomechanical resonator
Issue Date: 2017
Publisher: IEEE
Citation: IEEE Transactions on Applied Superconductivity, 27(4): pp. 1 - 5, (2017)
Abstract: We discuss steps toward the readout of the position of a nanoelectromagnetic system (NEMS) beam resonator using a Nb nanosuperconducting quantum interference device (nanoSQUID). We describe our fabrication procedure for coupling the nanoSQUID and a suspended Al-coated Si3N4 NEMS resonator together by a combination of focused ion beam lithography and nanomanipulation. We discuss typical electrical characteristics of the integrated devices, and independent postfabrication atomic force microscope nanoindentation measurements of the elastic properties of the integrated resonator to estimate its natural frequencies of vibration. We compare and discuss the response of a nanoSQUID with current-carrying and superconducting screening (noncurrent carrying) modes of operation of the resonator.
ISSN: 1051-8223
Appears in Collections:Dept of Mechanical Aerospace and Civil Engineering Research Papers

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