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Title: A golden template self-generating method for patterned wafer inspection
Authors: Xie, P
Guan, SU
Keywords: Wafer inspection;Golden template;Spectral estimation;PDI;Image-to-image reference method
Issue Date: 2000
Publisher: Springer Berlin / Heidelberg
Citation: Machine Vision and Applications, 12(3): 149-156, Oct 2000
Abstract: This paper presents a novel golden template self-generating technique for detecting possible defects in periodic two-dimensional wafer images. A golden template of the patterned wafer image under inspection can be obtained from the wafer image itself and no other prior knowledge is needed. It is a bridge between the existing self-reference methods and image-to-image reference methods. Spectral estimation is used in the first step to derive the periods of repeating patterns in both directions. Then a building block representing the structure of the patterns is extracted using interpolation to obtain sub-pixel resolution. After that, a new defect-free golden template is built based on the extracted building block. Finally, a pixel-to-pixel comparison is all we need to find out possible defects. A comparison between the results of the proposed method and those of the previously published methods is presented.
ISSN: 0932-8092
Appears in Collections:Electronic and Computer Engineering
Dept of Electronic and Computer Engineering Research Papers

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