Please use this identifier to cite or link to this item: http://buratest.brunel.ac.uk/handle/2438/8304
Title: Study of a micro chamber quadrupole mass spectrometer
Authors: Zhang, X
Mao, F
Xiao, M
Cui, Y
den Engelsen, D
Lei, W
Keywords: Quadrupoles;Vacuum chambers;Ion sources;Ceramics;Mass spectrometers
Issue Date: 2008
Publisher: American Institute of Physics
Citation: Journal of Vacuum Science and Technology Part A: International Journal Devoted to Vacuum, Surfaces, and Films, 26(2), Article number 239, 2008
Abstract: The design of a micro chamberquadrupolemass spectrometer (MCQMS) having a small total volume of only 20 cm3, including Faraday cup ion detector and ion source, is described. This MCQMS can resist a vacuum baking temperature of 400–500 °C. The quadrupole elements with a hyperbolic surface are made of a ceramic material and coated with a thin metal layer. The quadrupole mass filter has a field radius of 3 mm and a length of 100 mm. Prototypes of this new MCQMS can detect a minimum partial pressure of 10−8 Pa, have a peak width of ΔM=1 at 10% peak height from mass number 1 to 60, and show an excellent long-term stability. The new MCQMS is intended to be used in residual gas analyses of electron devices during a mutual pumping and baking process.
Description: Copyright @ 2008 American Vacuum Society / American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in Journal of Vacuum Science and Technology Part A: International Journal Devoted to Vacuum, Surfaces, and Films, 26(2), Article number 239 and may be found at http://scitation.aip.org/content/avs/journal/jvsta/26/2/10.1116/1.2827512.
URI: http://scitation.aip.org/content/avs/journal/jvsta/26/2/10.1116/1.2827512
http://bura.brunel.ac.uk/handle/2438/8304
DOI: http://dx.doi.org/10.1116/1.2827512
ISSN: 0734-2101
Appears in Collections:Materials Engineering
Wolfson Centre for Materials Processing

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